Application Field, Quantum Technology

Quantum Technology
Foundry Services

At Nanosystems JP Inc., the processes quantum hardware groups struggle to source, deep silicon etching, glass vias, indium and gold bumping, UHV-compatible AuSn, wafer bonding, fused silica optics, ion implantation, run as one flow, from single wafers, managed end to end by a dedicated project manager. This page maps five quantum platforms to the services that build them, and the four packaged offerings we ship most.

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Trapped ions Neutral atoms Photonic QC Spin & color centers Quantum sensing From 1 wafer Cryo to UHV Academic-friendly lots
5
Quantum platforms mapped
to one process flow
Ø20µm
Standard glass vias,
>95% yield, void-free Cu
50:1
DRIE aspect ratio for
trenches and cavities
1
Wafer minimum -
built for research groups
Platform 01
Trapped ions:
surface trap chips

Surface traps want thick gold electrodes, deep trenches for optical access, backside routing so wirebonds stay out of laser paths, and through-holes for beams. That is our DRIE (Bosch, 50:1), TGV, thick Au plating, and Ti/Au patterning in one program, with AuSn as the fluxless, low-outgassing die attach inside the vacuum can.

🕸

Electrodes & Routing

Thick electroplated Au electrode layers with Ti/Au lift-off patterning, backside redistribution, and double-side lithography so control wiring leaves the optical plane clear.

🕳

Trenches & Through-Holes

DRIE trenches and loading slots at 50:1 aspect ratio, plus through-substrate laser access holes, in Si or via unfilled through-glass vias.

🔩

In-Vacuum Assembly Metal

AuSn multilayer stacks for fluxless die attach on carriers, no flux, no organics, nothing to outgas next to the trap.

Platform 02
Neutral atoms:
cells, windows, and apertures

Vapor and vacuum cells are glass-and-silicon stacks: etched Si bodies, anodic and adhesive bonding to glass, and patterned metal on transparent substrates. Our fused silica program and micron-scale metal meshes on sapphire are already neutral-atom optics parts in all but name.

🫙

Cell Bodies

DRIE cavities in silicon bonded to glass windows, anodic, adhesive, or eutectic per your stack, as sealed bodies or open halves.

🪟

Patterned Windows

Ti/Au, apertures, and fine metal meshes patterned on fused silica and sapphire, double-side where the optics demand it.

🎯

Apertures & Masks

Micron-scale apertures and beam-defining features by lift-off on transparent substrates, aligned front to back.

Platform 03
Photonic & quantum
communication

Waveguide-era quantum hardware runs on our photonics stack: SiN and low-temperature dielectrics, AR stacks, edge coupling and V-grooves, CMP planarization, and glass TGV interposers for driver and detector integration. These are the inquiries we already receive.

🔭

Waveguide-Safe Processing

SiN and SiO₂ films at photonics-safe temperatures, CMP planarization below 0.5nm Ra, and facet-respecting dicing.

🧩

Interposers & Vias

Glass TGV interposers, Ø20µm standard vias with void-free Cu fill, for cryo drivers, detectors, and fan-out.

🔌

Coupling Features

Edge coupling notches, V-grooves, and fiber-attach geometries etched and diced to your coupling design.

Platform 04
Spin qubits &
color centers

Defect engineering is ion implantation plus activation annealing plus fine lithography, on Si and SiC. Our SiC substrate experience and Ni-based lift-off contact work transfer directly; diamond programs are discussed per inquiry.

🎯

Implant & Activate

Ion implantation with species and dose per your defect recipe, followed by RTA or furnace activation in the same flow.

💠

SiC Processing

SiC substrates procured and processed, contacts by lift-off, annealing, and the handling wide-bandgap wafers require.

🔬

Registration Features

Alignment marks, mesas, and contact patterns at stepper accuracy so single defects can be found again.

Platform 05
Quantum sensing:
OPMs and chip-scale clocks

The segment closest to real volume and least served by incumbent foundries. MEMS alkali vapor cells are DRIE cavities plus anodic or adhesive glass bonding plus windows, a flow our microfluidics and bonding lines already run. See the dedicated MEMS vapor cell page.

🧲

Vapor Cell Bodies

Si cavity bodies bonded to glass, delivered as open halves or bonded unfilled bodies; alkali filling by arrangement.

🪟

Optical Windows

Polished, patterned windows with apertures and coatings coordinated through the fused silica program.

📦

Toward Volume

From single prototype pairs to repeat lots on a fixed recipe, the scaling path OPM and clock programs need.

The Map
Five platforms, one flow,
four offerings

Every platform above routes into the same shared process core, and out of it come the four packaged offerings below.

Trapped ionsNeutral atomsPhotonic QCSpin + color centersQuantum sensingONE PROCESS FLOWDRIE 50:1TGV Ø20µm · >95%LithographyPVD / platingBonding ×6CMP <0.5nm RaImplant + RTADicingDedicated project manager · from 1 waferCryo / UHV MetallizationAuSn · Ti/Pd/Au · ringsOptical Access Componentswindows · meshes · holesMEMS Vapor Cellsunfilled bodiesTFOI Wafersquartz-on-Si · LNOI+ TGV / TSV interposer platform
5 platforms → one shared process core → 4 packaged offerings
Packaged Offerings
Four things quantum groups
order most

Each is a page of its own, with specs, and each orders from a single wafer.

The quantum menu
Ready-to-quote packages on the same flow
Everything below runs under one program with shared lithography, deposition, and metrology, so mixed orders stay coherent.
01
AuSn · Ti/Pd/Au · seal rings
Fluxless AuSn multilayer PVD, Ti/Pd/Au and Ti/Pt/Au stacks, patterned lift-off, and low-outgassing seal rings for in-vacuum and cryostat assembly.
02
Windows · apertures · thru-holes
Double-side patterned windows, metal apertures and meshes on sapphire and fused silica, through-glass holes, and bonded cell bodies.
03
DRIE cavity · anodic bond · windows
Alkali vapor cell bodies for OPM magnetometers and chip-scale clocks, delivered unfilled, with getter and filling features per your design.
04
Quartz-on-Si · LNOI · piezo films
Engineered substrates in 3-5 wafer prototype lots: quartz on silicon below 570°C, lithium niobate on insulator, and piezo films on carriers.
Interposer & via platform: HR-Si TSV and glass TGV with Cu fill, CMP, RDL, thinning, dicing, see the TGV and TSV pages
Ion trap chip programs: DRIE + TGV + thick Au + Ti/Au + UHV AuSn, quoted per design
Indium and gold bump hybridization next door: In bumps and superconducting films
Josephson-adjacent Dolan bridge work by arrangement, see the indium page
Every order from 1 wafer; NDA-friendly, publication-friendly
One RFQ covers mixed scopes across platforms
Why Nanosystems JP Inc.
Built the way quantum programs
actually buy
01

Single-wafer native

Research lots are our standard offer, not a favor. Prototype on one wafer, publish, then repeat on the same recipe.

02

The awkward processes, together

Deep etch, glass vias, indium, AuSn, bonding, implantation: the steps that usually mean five different quotes run here as one program.

03

Cryo and UHV literacy

Fluxless metallurgies, low-outgassing choices, and material selections made for vacuum cans and cryostats, not just reflow ovens.

04

Transparent-substrate fluency

Fused silica, sapphire, and glass are first-class substrates in this flow, patterned, drilled, bonded, and diced routinely.

05

One project manager, one thread

Mixed-platform programs stay coherent, managed end to end by a dedicated project manager from RFQ to shipment.

06

Specs on real pages

Every offering above links to a full specification page, so your design review starts from numbers, not adjectives.

Full process menu

Capabilities: The complete list of processes behind these platforms, lithography to dicing, on one page.

Capabilities →

Start your project.
Response within 24 hours.

Share your process requirements, substrate, and production volume. A Nanosystems JP Inc. engineer will respond within 24 hours. Full quote typically within 7-10 business days, subject to project complexity and NDA requirements.

To speed up technical review, please include:
substrate type & size  ·  target process  ·  quantity  ·  timeline  ·  design files if available (not required for first review)
Not ready to share details? Request NDA first →

[email protected] · +81-3-5288-5569 · NDA available on request

Ready to discuss this process?
Technical review within 24 hours of inquiry. NDA available.
Request a Quote →
All Services
Full process flow →
Substrates
🔷 Substrate & WafersSi, SiC, GaN, glass, sapphire 🔬 Fused Silica WafersQuartz · borosilicate · low CTE 🟣 PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
🎭 Mask FabricationGDS to chrome mask, DRC 💡 PhotolithographyE-beam 20nm to 500×600mm 🔬 NanoimprintingUV & thermal NIL 🔵 Thin Film DepositionPVD, CVD, ALD, MBE ⬆️ LiftoffMetal pattern · shadow mask ⚡ ElectroplatingCu TSV fill, DPC, LIGA ⚗️ EtchingICP-RIE, DRIE >50:1 🌡️ AnnealingN₂/H₂/vacuum/RTA 🎯 Ion ImplantationB/P/As/Al/N implant 🔶 CMP & GrindingCu CMP, 50µm thinning ✂️ DicingBlade, stealth laser 🧪 Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
🔗 Wafer BondingHybrid, eutectic, fusion 📌 TSV FabricationHigh AR, void-free Cu fill 🔓 TSV RevealBackgrind → etch → CMP 🪟 TGV FabricationThrough-glass via 📐 RDL FabricationBCB/PBO/PI + damascene 📦 Packaging & AssemblyWire bond, flip-chip 📚 3D/2.5D PackagingTSV+RDL+UBM+C4 🥇 AuSn BumpPVD lift-off, fluxless 🥈 Indium BumpEvap lift-off · cryo/quantum 🧱 UBM DepositionTi/Pt/Au · adhesion-barrier-Au 🪙 Gold BumpEvap & plated · Au-Au TC 🔥 AuGe / AuSi356/363°C eutectic die attach 🛰️ High-Pb Bumps95Pb5Sn · hi-rel C4 ⚗️ SLID / TLPCu/Sn · Au/In · Ag/In 🔒 Al-Ge Sealing424°C · CMOS-friendly MEMS ⚡ Ohmic ContactsGaAs · GaN · RTA + TLM 🧊 Cryo & UHV MetallizationAuSn · Ti/Pd/Au · seal rings 🪟 Optical AccessWindows · meshes · thru-holes 🫙 MEMS Vapor CellsDRIE + bond · unfilled bodies 💠 Thin-Film-on-InsulatorQuartz-on-Si · LNOI 🧬 Biochip & MicrofluidicsGlass 500×600mm, NIL 🔆 SiPho PackagingTSV·RDL·UBM·C4 for PIC
Industries
🤖 AI & HPC PackagingCoWoS-style, 2.5D/3D 💎 Silicon PhotonicsSOI · AuSn · TSV interposer ⚛️ Quantum TechnologyIon traps · vapor cells · TFOI 🚗 AutomotiveMEMS sensors, SiC power 🧬 Life SciencesLab-on-chip, biosensors 🔭 All Industries → Request a Quote →
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⚙️ Capabilities Overview
Substrates
🔷 Substrate & WafersSi, SiC, GaN, glass, sapphire 🔬 Fused Silica WafersQuartz · borosilicate · low CTE 🟣 PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
🎭 Mask FabricationGDS to chrome mask, DRC 📷 PhotolithographyE-beam 20 nm to 500×600 mm 🔬 NanoimprintingUV & thermal NIL 🫧 Thin Film DepositionPVD, CVD, ALD, MBE 🖥 TFT & BackplaneIGZO · Glass · Display ⬆️ LiftoffMetal pattern · shadow mask ⚡ ElectroplatingCu TSV fill, DPC, LIGA 🌊 EtchingICP-RIE, DRIE >50:1 🔥 AnnealingN₂ / H₂ / vacuum / RTA ⚛️ Ion ImplantationB / P / As / Al / N implant 🔄 CMP & GrindingCu CMP, 50 µm thinning 💎 DicingBlade, stealth laser 🧪 Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
🔗 Wafer BondingHybrid, eutectic, fusion 📌 TSV FabricationHigh AR, void-free Cu fill 👁️ TSV RevealBackgrind → etch → CMP 🪟 TGV FabricationThrough-glass via 🔀 RDL FabricationBCB / PBO / PI + damascene 📦 Packaging & AssemblyWire bond, flip-chip 📚 3D / 2.5D PackagingTSV + RDL + UBM + C4 🥇 AuSn BumpPVD lift-off, fluxless 🥈 Indium BumpEvap lift-off · cryo/quantum 🧱 UBM DepositionTi/Pt/Au · adhesion-barrier-Au 🪙 Gold BumpEvap & plated · Au-Au TC 🔥 AuGe / AuSi356/363°C eutectic die attach 🛰️ High-Pb Bumps95Pb5Sn · hi-rel C4 ⚗️ SLID / TLPCu/Sn · Au/In · Ag/In 🔒 Al-Ge Sealing424°C · CMOS-friendly MEMS ⚡ Ohmic ContactsGaAs · GaN · RTA + TLM 🧊 Cryo / UHV MetalAuSn · Ti/Pd/Au · rings 🪟 Optical AccessWindows · meshes · holes 🫙 Vapor CellsDRIE + bond · unfilled 💠 TFOI WafersQuartz-on-Si · LNOI 🧬 Biochip & MicrofluidicsGlass 500×600 mm, NIL 🔆 SiPho PackagingTSV · RDL · UBM · C4 for PIC
Industries
🤖 AI & HPC PackagingCoWoS-style, 2.5D / 3D 💡 Silicon PhotonicsSOI · AuSn · TSV interposer 🚗 AutomotiveMEMS sensors, SiC power 🧬 Life SciencesLab-on-chip, biosensors 🔭 All Industries → Request a Quote →